monocrystal sappire wafers

WaferHome can manufacture the high purity Semi grade/optics grade Sappire wafer wafers

Specification for monocrystal sappire wafers

               
Grade Dimeter

Roughness

Orientaion

thickness

Flat

Surface Geometric parameter
Epi-ready sappire wafer 50.8mm <0.3nm

<0001> <1102> or special orientation

450um+/-20 to <1120> <1100>16mm polished/etched polished/polished TTV < 5um TIR <5um BOW < 10um Warp < 10um
76.5mm <0.3nm <0001> <1102> or special orientation 450um+/-20 to <1120> <1100>22.5mm polished/etched polished/polished TTV < 5um TIR <5um BOW < 10um Warp < 10um
100mm <0.3nm <0001> <1102> or special orientation 650um+/-20 to <1120> <1100> 32.5mm polished/etched polished/polished TTV < 15um TIR <10um BOW < 20um Warp < 20um
150mm <0.3nm <0001> <1102> or special orientation 1500um+/-20um to <1120> <1100> 47.5mm polished/etched polished/polished TTV < 15um TIR <10um BOW < 20um Warp < 20um
200mm <0.3nm <0001> <1102> or special orientation 1300um+/-20um to <1120> <1100> 47.5mm polished/etched polished/polished TTV < 15um TIR <10um BOW < 20um Warp < 20um
Pattern sappire wafer 50.8mm <0.3nm

<0001> <1102> or special orientation

450um+/-20 to <1120> <1100>16mm Pattern Feature customization Epi-ready polished TTV < 5um TIR <5um BOW < 10um Warp < 10um
76.5mm <0.3nm <0001> <1102> or special orientation 450um+/-20 to <1120> <1100>22.5mm Pattern Feature customization Epi-ready polished TTV < 5um TIR <5um BOW < 10um Warp < 10um
100mm <0.3nm <0001> <1102> or special orientation 650um+/-20 to <1120> <1100> 32.5mm Pattern Feature customization Epi-ready polished TTV < 15um TIR <10um BOW < 20um Warp < 20um
150mm <0.3nm <0001> <1102> or special orientation 1300um+/-20um to <1120> <1100> 47.5mm Pattern Feature customization Epi-ready polished TTV < 15um TIR <10um BOW < 20um Warp < 20um
200mm <0.3nm <0001> <1102> or special orientation 1500um+/-20um to <1120> <1100> 47.5mm polished/etched polished/polished TTV < 15um TIR <10um BOW < 20um Warp < 20um